Full-Text PDFMEMS technology moves process spectroscopy into a new dimensionRichard A. CrocombeAxsun Technologies, Inc., 1 Fortune Drive, Billerica, MA 01821, USA Rate this ArticleSelect ratingGive it 1/5Give it 2/5Give it 3/5Give it 4/5Give it 5/5 No votes yetTechnique: Near Infrared (NIR) Log in or register to post comments