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Spectroscopic ellipsometry

Infrared mapping spectroscopic ellipsometry

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The authors describe “Infrared mapping spectroscopic ellipsometry”. Recent developments in fundamental and materials research have increased the value of mapping techniques such as ellipsometry. IR ellipsometry, since it operates in the mid-IR fingerprint region, provides complementary information on composition, structural properties and interactions

Combined infrared and visible spectroscopic ellipsometry study of thin polymer layers

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Thin polymer layers on solid substrates are of high technological importance due to their increasing potential for applications in electronics, sensors, nanotechnology and biotechnology. Appropriate characterisation methods are necessary for the design and analysis of devices made using such materials. This review article focuses upon presenting the many analytical possibilities for quantitative evaluation of the optical constants and thickness of polymer layers by combined application of spectroscopic ellipsometry (SE) in the visible (vis) and infrared (IR) spectral range.

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